Probe measurements of magnetron discharge parameters
نویسندگان
چکیده
منابع مشابه
Influence of O2 and N2 Concentrations on the Characteristics of Plasma in DC Cylindrical Magnetron Discharge by Langmuir Probe
Using the Langmuir probe method, the reactive plasma parameters were studied in different ratios of oxygen and nitrogen concentrations in a DC cylindrical discharge device.The plasma parameters such as plasma potential, electron density and electron temperature wereextracted from the current-voltage characteristic’s curve of Langmuir probe to find the optimum conditions for deposit the oxy...
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In this paper, plasma main characteristics such as electron mean temperature, electron number density, and oscillation frequency have been measured experimentally using the double Langmuir probe diagnostic system. In our experiment, the plasma was generated by applying the low pressure dc glow discharge in several common gases. The experimental results indicated the highest plasma density and o...
متن کاملinfluence of o2 and n2 concentrations on the characteristics of plasma in dc cylindrical magnetron discharge by langmuir probe
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J. T. Gudmundsson, N. Brenning, Daniel Lundin and Ulf Helmersson, High power impulse magnetron sputtering discharge, 2012, Journal of Vacuum Science & Technology. A. Vacuum, Surfaces, and Films, (30), 030801. http://dx.doi.org/10.1116/1.3691832 Copyright: American Vacuum Society, This article may be downloaded for personal use only. Any other use requires prior permission of the author and the ...
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Modulated pulse power MPP technology is a derivative of high power pulsed magnetron sputtering that allows unprecedented user control over the growth process, although the critical time-dependent plasma properties during the power pulse have not been studied until now. Using a MPP plasma generator, pulses of custom voltage waveforms were generated and applied to the cathode of a 36 cm diameter ...
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ژورنال
عنوان ژورنال: Journal of Physics: Conference Series
سال: 2016
ISSN: 1742-6588,1742-6596
DOI: 10.1088/1742-6596/729/1/012021